JPH0222597U - - Google Patents
Info
- Publication number
- JPH0222597U JPH0222597U JP10027988U JP10027988U JPH0222597U JP H0222597 U JPH0222597 U JP H0222597U JP 10027988 U JP10027988 U JP 10027988U JP 10027988 U JP10027988 U JP 10027988U JP H0222597 U JPH0222597 U JP H0222597U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- ceramic molded
- combination piece
- horizontal
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Chemical Vapour Deposition (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10027988U JPH0222597U (en]) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10027988U JPH0222597U (en]) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222597U true JPH0222597U (en]) | 1990-02-15 |
Family
ID=31328219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10027988U Pending JPH0222597U (en]) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222597U (en]) |
-
1988
- 1988-07-27 JP JP10027988U patent/JPH0222597U/ja active Pending